Members Only
Contact
Tel: 310-794-4763
Fax: 310-206-4107
jpchang@ucla.edu
ANALYSIS FACILITIES |
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| XPS |
QMS |
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| OES |
Probe Station |
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RHEED |
FTIR |
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Ellipsometer |
PL Laser |
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PROCESS FACILITIES |
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| Plasma Etching |
Integrated Processing |
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| PECVD/PEALD |
Surface Prep |
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Molecular Beam |
ALD |
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Chemical Processing Bench |
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Copyright 2003. All Rights Reserved.