Electronic Materials Synthesis and Plasma Processing Lab

Chang Lab - Group Members

POSTDOCTORAL RESEARCHERS
Lab Phone: (310) 983-3308
 
 

Taesung Kim, PhD.


Magnetic metal alloy etching for MRAM applications

 

Investigate the etching of magnetic transition metals for MRAM device fabrication, as well as the theoretical calculation of the volatility of the etching products.




Younghee Kim, PhD.



GRADUATE STUDENTS
Lab Phone: (310) 983-3308





   

 





Calvin Pham

 

Atomic layer deposition of complex metal oxides

Assess the effect of composition and spatial distribution of elements in the multiferroics on their magnetoelectricity, thereby enabling a rational design of an optimal material.  Use atomic layer deposition to realize highly conformality synthetic multi-ferroic materials at low temperatures to form strongly coupled interfaces needed to achieve magnetoelectricity. 

 


Jea (Jay) Cho

 

Ultra-thin ion conductive films as solid electrolytes for energy storage  

Utilize atomic layer deposition to control the composition, microstructure, morphology, and fabrication of ultra-thin solid electrolytes for solid oxide fuel cell and Li-ion battery, especially in microelectromechanical systems (MEMS) based micro-power systems.  Assess the improvement in power density per foot print by using conformal ALD coatings to realize the high density integration in 3-D device structures.

 

 




Diana Chien
 


Jack Chen

 



Cyrus Cheung


Colin Rementer











Jeffrey Chang










Nicholas Altieri










Trevor Seegmiller





UNDERGRADUATE STUDENTS



















HIGH SCHOOL INTERNS

       










FORMER STUDENTS




Michael Paine (undergraduate)


Institution: UCLA, Class of 2014







Juan Casillas (undegraduate)


Institution: UCLA, Class of 2014







Edward McAboy (undergraduate)


Institution: UCLA, Class of 2015







Taylor Evanko (undergraduate)


Institution: UCLA, Class of 2015







Vladan Jankovic

 


Core-shell nanostructures for plasmonics 



Currently: Northrop Grumman, California



Nathan Marchack

 


Plasma Patterning of Complex Materials



Currently: IBM, New York






Ya-Chuan (Sandy) Perng

 


Engineering Epitaxial Metal Oxides on Wide Bandgap Semiconductors


Currently: Intel Corporation, Oregon






Kristen Fernhoff

 


Comparison of intrinsic and engineered multi-ferroic materials 

 

Currently: Washington University in St Louis







James Dorman


Multifunctional Metal Oxide Nanostructures  


Currently: Universitaet Konstanz in Germany






Han Chueh
 
Density functional theory study of complex metal oxides

Currently: UCLA





 

Ashley Armenta

 

Characterization of the Electronic and Electrical Properties of Metal Oxides

 

Mayfield Senior School, Pasadena, CA

 

 

     

 

Katia Ameri  (High School Intern)

 

Marlborough School, Los Angeles, Ca

 

Electrochemistry Study for Micro-Lithium Ion Batteries

 

Currently: Stanford University

     


Brett Berens (undergraduate)

 

X-ray Photoelectron Spectroscopy Study of Plasma Etched Metal Oxides and
Device Testing

 

 

 

Tara Chang (High School Intern)

 

Simulation of a Cylindrical Ion Trap as a Micro-Chemical Analyzer


Marlborough High School, Los Angeles, CA.

Currently: MIT






Byeong-Ok Cho, Ph.D. (postdoctoral researcher)

Spectroscopic Studies of Plasma Enhanced Chemical Vapor Deposition (PECVD)

Currently: Samsung Electronics, Korea

 


Jongwoo Choi, Ph.D. (postdoctoral researcher)

Spectroscopic Studies of Dielectric/Semiconductor Interfaces

 

Currently: GE Research, New York

 



Karen Chu (Masters Student)
 

Electrical Characterization of Carbon-Doped Ta2O5 Films for Embedded DRAM Applications


Currently: Nanomix, Inc., California



Kimberly Cross (Masters Student)
 

Surface Chemistry of Organometallic Precursors

 

Currently: University of California, Los Angeles



Dolores Cruz (Ph.D Student)


Chemical Microelectromechanical Systems  

 

Currently: Intel Corporation, California

 

 

Carissa Eisler (Undergraduate)


Analysis of Ultra-Thin Films and Interfaces by Extended X-Ray Absorption Fine Structure (EXAFS).

 

Currently : California Institute of Technology (Caltech)





Kelly Halford (High School Intern)

 

Microfluidics

Mayfield Senior School, Pasadena, CA.

Currently: Princeton University

 

 

John Hoang

 

Sensitizer co-doped Er:Y2O3 Thin Films for Optical Applications

Currently: National Institute of Standards and Technology


Jerry's picture


Chengche (Jerry) Hsu, Ph.D. (Post Doc)

 

High Density Plamsa Diagnostics and Simulation

 

Currently: National Taiwan University, Taiwan



Vladan Jankovic (Masters Student)

FET-based Microchemical Sensors Employing HfO2 and ZrO2

 

Currently: Northrop Grumman Corporation, California






John Keagy (undergraduate)

Solid State Electronic Device Fabrication

Currently: Graduate Student, UT Austin

 



Angela Ku (High School Intern)

High Density Plasma Etching Processes

 

Mayfield Senior School, Pasadena, CA.

Currently: Yale University

 


Sandy Lao (Masters Student)

Investigation of Plasma Enhanced Deposition of Zirconium Oxide and Hafnium Oxide Thin Films

Currently: Intel Corporation, Arizona

 


Jingyan (Leo) Li (Masters Student)

 

Deposition of Functionally Engineered Dielectric Thin Films

 

Currently: Intel Corporation, New Mexico

 


 

Vu Le (Masters Student)

 

Plasma Reactor Scale Modeling

 

Currently: Matech Advanced Materials, Westlake Village

 



Shirley Lee (undergraduate)

Infrared Spectroscopy of Thin Film Analysis

Currently: Graduate Student, UC Irvine



 




Jasmine Lin (undergraduate)

 

Diagnostic instrumentation on an ECR reactor for thin film deposition

Currently: Process Development Engineer, Novellus Systems, Inc.



 




You-Sheng (Wilson) Lin, Ph.D. (Ph.D. student)

 

Synthesis and Integration of High-k Dielectric Materials

Currently: Engineer, UCLA Nanoelectronics Research Facility

     

 

Jiurong Liu, Ph.D. (Post-Doc)

 

Material and Electrical Characterization of Metal Oxides Synthesized by Plasma Enhanced Atomic Layer Deposition

Currently: School of Material Science & Engineering,

                 Shandong University, China

     

 

Ryan Martin, Ph.D. (Ph.D. Student)

 

High Density Plasma Enhanced Patterning of Metal Oxides

Currently: IBM, New York

 

     

 

Monica Sawkar-Mathur, Ph.D. (Ph.D. Student)

 

Deposition of Functionally Engineered Dielectric Thin Films

 

Currently: Intermolecular, San Jose

     

 

Yuanbing Mao, Ph.D. (Post-Doc)

 

Synthesis and Characterization of Metal Oxide Nano-structures

 

Currently: University of Texas, Pan American
     

 

Chris McCormick (undergraduate)

First-Principles Study of Silicon Carbide, a promising wide band gap semiconductor

 

Currently: Graduate Student, Stanford

 



Ragesh Puthenkovilakam, Ph.D. (Ph.D. student)

Experimental and Theoretical Studies of High-k Dielectrics on Silicon

Currently: Intel Corporation, Oregon

       
 


Desiree Ramirez (Masters Student)

Ion-enhanced Chemical Etching of Metal Oxides in Chlorine Based Plasmas

Currently: Accenture, California


     




Phedellee Reyer (High School Intern)


Process for Creating Complimentary Metal-Oxide-Semiconductors (CMOS)


Mayfield Senior School, Pasadena, CA.

Currently: University of California, Irvine

 



Lin Sha, Ph.D. (Ph.D. student)

Plasma Enhanced Etching of Metal Oxides

Currently: Intel Corporation, Oregon


       

 


Yen Ta (Masters Student)

X-ray photoelectron spectroscopic analysis of halogen etched metal oxide films

Currently: Analog Device, California

       



Melat Tafesse


Microstructures of Ultra-thin Dielectric Films

 

Currently: Micron, Virginia

   

Carey Tanner, Ph.D. (Ph.D. Student)


Engineering Compositionally Controlled Crystalline Metal Oxides on Wide Bandgap Semiconductors


Currently: Luna Nanoworks, Virginia

   

Trinh Tu Van, Ph.D. (Ph.D. Student)


Molecular Beam Simulation of Surface Kinetics

Currently: Intel Corporation, Oregon

   

Nicky Virdone (High School Intern)


Optical emission analysis of plasma processing

 

Mayfield Senior School, Pasadena, CA.


Currently: UCLA

   

Jianjun Wang (Masters Student)

High Density Plasma Enhanced Deposition of Metal Oxides

 
Currently:

Feng Zhang (Post-Doc)


Atomic Layer Deposition of Ferroelectric Thin Films on Wide Band Gap Semiconductors


Currently: Institute of Semiconductors, Chinese Academy of Science.

Stephanie Gachot (Masters Student)

 

Synthesis and Characterization of Metal Silicide Nanoparticles

 

Currently: Intel Corporation, Arizona

Colleen Loynachan (Summer Intern)

Thin film electrolyte materials for solid oxide fuel cells

Currently: MIT

Hiroshi Yamamoto

 

 

Group Photos
2000-2001
   
2001-2002
   
2002-2003
   
2003-2004
   
2004-2005  
   
2005-2006  
   
2006-2007
   
2008-2009

   
2010-2011

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