Professor Robert F. Hicks
AVS Fellow, 2001

Welcome to our site!  Our research focuses on the surface chemistry and engineering of semiconductor manufacturing processes.  We are interested in the chemical vapor deposition of compound semiconductors and in atmospheric plasma processing of materials.

 

[Check out our latest research tool here!]

 

Office
5532-J Boelter Hall
Lab
6631 Boelter Hall
Phone
(310) 206-6865
Fax
(310) 206-4107
Email
rhicks@ucla.edu

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Chemical Vapor Deposition

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Atmospheric Plasma

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Gallery of STM Images

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Molecular Clusters

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Publications

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Laboratory

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ChE 104C

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ChE 210

Department of Chemical Engineering,     University of California, Los Angeles

Copyright 1996-2007, R. F. Hicks, Semiconductor Material Chemistry and Plasma Processing Laboratory, University of California, Los Angeles.

For information, please contact Professor Robert F. Hicks
Last Modified May 21, 2007 05:58 PM