Laboratory

     At UCLA, we have a world-class facility for conducting research in chemical vapor deposition and plasma processing.  Moreover, our people are just outstanding!  You cannot find a better place to obtain a Ph.D. degree in the exciting field of semiconductor manufacturing.

      Check out our new MOCVD reactor for research on manufacturing InP optoelectronic integrated circuits:

Click on the links below to learn more about our program.

bullet

Group Members

bullet

Facilities

bullet

Sponsors

bullet

Awards

bullet

Recent Graduates

bullet

Nanoelectronics Research Facility

bullet

Semiconductor Curriculum

 

  Department of Chemical Engineering, University of California, Los Angeles

© Copyright 1996-2007, R. F. Hicks, Semiconductor Material Chemistry and Plasma Processing Laboratory, University of California, Los Angeles.

For information, please contact Professor Robert F. Hicks
Last Modified May 21, 2007 05:58 PM