Laboratory

     At UCLA, we have a world-class facility for conducting research in chemical vapor deposition and plasma processing.  Moreover, our people are just outstanding!  You cannot find a better place to obtain a Ph.D. degree in the exciting field of semiconductor manufacturing.

      Check out our new MOCVD reactor for research on manufacturing InP optoelectronic integrated circuits:

Click on the links below to learn more about our program.

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Group Members

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Facilities

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Sponsors

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Awards

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Recent Graduates

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Nanoelectronics Research Facility

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Semiconductor Curriculum

 

  Department of Chemical Engineering, University of California, Los Angeles

Copyright 1996-2007, R. F. Hicks, Semiconductor Material Chemistry and Plasma Processing Laboratory, University of California, Los Angeles.

For information, please contact Professor Robert F. Hicks
Last Modified May 21, 2007 05:58 PM