Below is the most recent list of patents currently held by Professor Jane Chang.
1. Herbert H. Sawin, Jane P. Chang. Scott A.
Lawing, Zhe Zhang, and Han Xu, “Metals removal process” U.S. patent
6,083,413, 26 claims, 2000.
2. Jane P. Chang, Y-S. Lin, A. Kepten, M. Sendler, S. Levy, and
R. Bloom, “Methods for Depositing A Coating Having a Relatively
High Dielectric Constant onto a Substrate” U.S. patent 6,884,719,
43 claims, 2005.
3. Jane P. Chang, and Robert L. Opila, “UV/halogen metal removal
process” Pending.
4. Jane P. Chang, and M. L. Steigerwald, “ Doping effect in a MOM
capacitor structure” Pending.
5. Jane P. Chang, and Robert L. Opila, “UV enhanced chemistry for
metal and oxide removal” Pending.