These notes have been
published. By agreement with the publisher,
they cannot be
accessed from this site.
Lectures
by Prof. F.F. Chen
| Part
1 |
Introduction to Plasma Science |
| Part 2 |
Introduction to Gas
Discharges |
| Part 3 |
Plasma Sources I: Introduction |
| Part 4 |
Plasma Sources II: Sheaths and RIE
reactors |
| Part 5 |
Plasma Sources III: ECR and ICP
reactors |
| Part 6 |
Plasma Sources IV: Helicon and
high-density plasmas |
| Part 7 |
Plasma Diagnostics |
| Part 8 |
Current Problems in Semiconductor
Processing |
Lectures
by Prof. J.P. Chang
|
Part 1 |
Overview of Plasma
Processing |
|
Part 2 |
Kinetic Theory and Collisions |
|
Part 3 |
Atomic Collisions and Spectra |
|
Part 4 |
Molecular Collisions and Spectra |
|
Part 5
|
Plasma Diagnostics |
|
Part 6
|
Plasma Surfact Kinetics |
| Part 7 |
Feature Evolution and Modeling |
| Part 8 |
Current Problems in Semiconductor Processing |
[ Up ] [ Course Outline ] [ Syllabus ] [ Lecture notes ] [ Homework ]
