Electronic Materials Synthesis and Plasma Processing Lab

Research activities are focused on the synthesis and patterning of multi-functional complex oxide films with tailored electronic, chemical, thermal, mechanical, and biological properties. Experimental and theoretical studies are combined to understand the process chemistry and surface kinetics in atomic layer deposition, plasma etching and deposition processes, and gas-phase surface functionalization processes. Novel devices including advanced microelectronics, optoelectronics, and chemical sensors are realized at nano-dimensions as the technologies become more enabling based on these fundamental studies.