COURSES
Spring 2008
ChE 104C - Semiconductor Processing
(Lecture)
Spring 2008
Course Webpage
Prerequisites: ChE 104A, EE2
Lecture/Recitation/Study: 4/1/5
Must be taken concurrently with 104CL
ChE 104CL - Semiconductor Processing
(Laboratory)
Spring 2008
Course Webpage
Prerequisites: ChE 104A, EE2
Lab/Recitation/Study: 4/0/5
Must be taken concurrently with 104C
Previous Terms
ChE 104C - Semiconductor Processing
(Lecture)
Spring 2007
Course Webpage
Prerequisites: ChE 104A, EE2
Lecture/Recitation/Study: 4/1/5
Must be taken concurrently with 104CL
ChE 104CL - Semiconductor Processing
(Laboratory)
Spring 2007
Course Webpage
Prerequisites: ChE 104A, EE2
Lab/Recitation/Study: 4/0/5
Must be taken concurrently with 104C
ChE 116/216 - Surface
and Interface Engineering
Winter
2007 Course Webpage
Prerequisites: ChE 113A
Lecture/Recitation/Study: 4/1/7
ChE 270 - Chemical Engineering
Principles of Semiconductor Manufacturing
Fall
2006 Course Webpage
Prerequisites:
Lecture/Recitation/Study: 4/0/8
ChE 104C - Semiconductor Processing
(Lecture)
Spring 2006
Course Webpage
Prerequisites: ChE 104A, EE2
Lecture/Recitation/Study: 4/1/5
Must be taken concurrently with 104CL
ChE 104CL - Semiconductor Processing
(Laboratory)
Spring 2006
Course Webpage
Prerequisites: ChE 104A, EE2
Lab/Recitation/Study: 4/0/5
Must be taken concurrently with 104C
ChE 116/216
- Surface and Interface Engineering
Fall 2005 Course Webpage
Prerequisites: ChE 113A
Lecture/Recitation/Study: 4/1/7
Student Poster Presentations:
ZnO
by Joe Bindel - Response
to questions by Bindel
Photovoltaic
Cell by Peter Malati - Response
to questions by Malati
Nanostructures
by Guanwen Yang - Response
to questions by Yang
ChE 104C
- Semiconductor Processing Lab
Spring 2005 Course Webpage
Prerequisites: ChE 104A, EE2
Lecture/Recitation/Study: 4/1/7
Student Poster Presentations:
STI by Chan, Hellems
Cu by Tafesse
High-k by
Zacharia, Pramme
Metal Gate
by Tran, Kahn
ChE 270 - Chemical Engineering Principles
of Semiconductor Manufacturing
Winter
2005 Course Webpage
Prerequisites:
Lecture/Recitation/Study: 4/0/8
ChE
234 - Principles of Plasma Processing
Spring 2004 Course Webpage
Prerequisites:
Lecture/Recitation/Study: 4/0/8
ChE
101B - Heat Transfer
Prerequisites: 101A
Lecture/Recitation/Study: 4/1/7
Syllabus
ChE 103 -
Separation Processes
Prerequisites: 100, 101B, 102
Lecture/Recitation/Study: 4/1/7
Syllabus
Sample Lecture Notes
Sample Homework
ChE 116/216
- Surface and Interface Engineering
Fall 2003 Course Page
Prerequisites: Chem 113A
Lecture/Recitation/Study: 4/1/7
Consult the Schedule
of Classes for courses being taught by Prof. Chang for the
current term.
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