Electronic Materials Synthesis and Plasma Processing Lab

Courses

 

COURSES

Spring 2011

ChE 104C - Semiconductor Processing (Lecture)
Spring 2011 Course Webpage
Prerequisites: ChE 104A, EE2
Lecture/Recitation/Study: 4/1/5
Must be taken concurrently with 104CL

ChE 104CL - Semiconductor Processing (Laboratory)
Spring 2011 Course Webpage
Prerequisites: ChE 104A, EE2
Lab/Recitation/Study: 4/0/5
Must be taken concurrently with 104C

Spring 2010

ChE 104C - Semiconductor Processing (Lecture)
Spring 2010 Course Webpage
Prerequisites: ChE 104A, EE2
Lecture/Recitation/Study: 4/1/5
Must be taken concurrently with 104CL

ChE 104CL - Semiconductor Processing (Laboratory)
Spring 2010 Course Webpage
Prerequisites: ChE 104A, EE2
Lab/Recitation/Study: 4/0/5
Must be taken concurrently with 104C

Spring 2009

ChE 104C - Semiconductor Processing (Lecture)
Spring 2009 Course Webpage
Prerequisites: ChE 104A, EE2
Lecture/Recitation/Study: 4/1/5
Must be taken concurrently with 104CL

ChE 104CL - Semiconductor Processing (Laboratory)
Spring 2009 Course Webpage
Prerequisites: ChE 104A, EE2
Lab/Recitation/Study: 4/0/5
Must be taken concurrently with 104C

ChE 116/216 - Surface and Interface Engineering
Spring 2009 Course Webpage
Prerequisites: ChE 113A
Lecture/Recitation/Study: 4/1/7

Previous Terms

ChE 101B - Transport Phenomena II - Heat Transfer (Lecture)
Winter 2009 Course Webpage
Prerequisites: ChE 101A
Lecture/Recitation/Study: 4/1/7

ChE 104C - Semiconductor Processing (Lecture)
Spring 2008 Course Webpage
Prerequisites: ChE 104A, EE2
Lecture/Recitation/Study: 4/1/5
Must be taken concurrently with 104CL

ChE 104CL - Semiconductor Processing (Laboratory)
Spring 2008 Course Webpage
Prerequisites: ChE 104A, EE2
Lab/Recitation/Study: 4/0/5
Must be taken concurrently with 104C

ChE 104C - Semiconductor Processing (Lecture)
Spring 2007 Course Webpage
Prerequisites: ChE 104A, EE2
Lecture/Recitation/Study: 4/1/5
Must be taken concurrently with 104CL

ChE 104CL - Semiconductor Processing (Laboratory)
Spring 2007 Course Webpage
Prerequisites: ChE 104A, EE2
Lab/Recitation/Study: 4/0/5
Must be taken concurrently with 104C

ChE 116/216 - Surface and Interface Engineering
Winter 2007 Course Webpage
Prerequisites: ChE 113A
Lecture/Recitation/Study: 4/1/7

ChE 270 - Chemical Engineering Principles of Semiconductor Manufacturing
Fall 2006 Course Webpage
Prerequisites:
Lecture/Recitation/Study: 4/0/8

ChE 104C - Semiconductor Processing (Lecture)
Spring 2006 Course Webpage
Prerequisites: ChE 104A, EE2
Lecture/Recitation/Study: 4/1/5
Must be taken concurrently with 104CL

ChE 104CL - Semiconductor Processing (Laboratory)
Spring 2006 Course Webpage
Prerequisites: ChE 104A, EE2
Lab/Recitation/Study: 4/0/5
Must be taken concurrently with 104C

ChE 116/216 - Surface and Interface Engineering
Fall 2005 Course Webpage
Prerequisites:
ChE 113A
Lecture/Recitation/Study: 4/1/7

Student Poster Presentations:
ZnO by Joe Bindel - Response to questions by Bindel

Photovoltaic Cell by Peter Malati - Response to questions by Malati
Nanostructures by Guanwen Yang - Response to questions by Yang

ChE 104C - Semiconductor Processing Lab
Spring 2005 Course Webpage
Prerequisites:
ChE 104A, EE2
Lecture/Recitation/Study: 4/1/7

Student Poster Presentations:
STI by Chan, Hellems

Cu by Tafesse
High-k by Zacharia, Pramme
Metal Gate by Tran, Kahn

ChE 270 - Chemical Engineering Principles of Semiconductor Manufacturing
Winter 2005 Course Webpage
Prerequisites:
Lecture/Recitation/Study: 4/0/8

ChE 234 - Principles of Plasma Processing
Spring 2004 Course Webpage
Prerequisites:

Lecture/Recitation/Study: 4/0/8

ChE 101B - Heat Transfer
Prerequisites:
101A

Lecture/Recitation/Study: 4/1/7
Syllabus

ChE 103 - Separation Processes
Prerequisites: 100, 101B, 102
Lecture/Recitation/Study: 4/1/7
Syllabus
Sample Lecture Notes
Sample Homework

ChE 116/216 - Surface and Interface Engineering
Fall 2003 Course Page
Prerequisites:
Chem 113A
Lecture/Recitation/Study: 4/1/7

 

Consult the Schedule of Classes for courses being taught by Prof. Chang for the current term.

   

 

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