Lab Facilities


The Chang Lab employs a wide variety of high vacuum chambers and systems utilized in synthesis, processing, and characterization of novel thin films. Additional equipment can be found in the UCLA Nanoelectronics Research Facility.

Instrumentation includes, but is not limited to, x-ray photoelectron spectroscopy (XPS), reflection high-energy electron diffraction (RHEED), and Fourier transform infrared spectroscopy (FTIR).

XPS



QMS



RHEED



Ellipsometer



FTIR



Thermal ALD



Plasma Etching



Ion Beam



RADICAL ENHANCED ALD



Chemical Processing



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