Team


The Chang lab is a diverse group of graduate student researchers, undergraduates, and post-docs from a wide array of backgrounds within the physical sciences.

Current as well as past members are listed below along with a brief description of their research. Please feel free to contact any of the current members below with any questions regarding their projects.

CURRENT RESEARCHERS


Katie Mackie

Katie Mackie, PhD
Postdoctoral Researcher
kemackie@ucla.edu

Elucidating surface effects of etching

Taylor Smith

Taylor Smith
Graduate Researcher
taylorgsmith@ucla.edu

Plasma assisted materials processing
Delineating the effect of low energy ions on directional modification of etch-resistant materials, thereby realizing ideal etching directionality and selectivity.

Owen Watkins

Owen Watkins
Graduate Researcher
owenwat@ucla.edu

Etch processes for BEOL material integration
Developing improved etch chemistry for back end of line materials to optimize etching parameters including anisotropy, selectivity, and roughness, with a focus on plasma processing.

Brian Park

Brian Park
Graduate Researcher
dbpark2@ucla.edu

Characterization of etch products from atomic layer etching processes
Developing mitigation strategies of down-stream reaction in commonly used chemical vapor deposition (CVD) and atomic layer deposition (ALD) through in-situ monitoring and ex-situ analysis.

Chi-Yun (Coco) Lin

Chi-Yun (Coco) Lin
Graduate Researcher
thechiyun@ucla.edu

Evaluating alternative and environmentally friendly etchants and processes

FORMER RESEARCHERS


Adrian Acosta, PhD
Engineering of Iron Gallium and Hafnium Oxide Interfaces for Magnetoelectric Applications
Currently: Lam Research Corporation
Xia (Gary) Sang, PhD
Plasma-Thermal Atomic Layer Etching of Metals
Currently: HiSilicon Research
Hamid Razavi, PhD (postdoctoral researcher)
Plasma assisted atomic layer deposition and atomic layer etching
Currently: Lam Research Corporation
Caitlyn Chen (Summer Intern)
Currently: UCLA
Yichen (Betty) Liu (Summer Intern, Undergraduate Researcher)
Characterization and Control of Energetic Reactions in the Downstream Sections of Deposition Tools and Simulation of Feature Profile Simulation
Norleakvisoth Lim (Summer Intern, Undergraduate Researcher)
Characterization and Control of Energetic Reactions in the Downstream Sections of Deposition Tools and Density Functional Theory Calculation of HfO2
Victoria Ng (Summer Intern)
Synthesis and characterization of metal oxide thin films
Lyn Genota (NSF RET, High School Teacher)
MESA course development
Arabella Dill-Macky (High School Intern)
Thin film materials for lithium ion battery
Currently: Princeton
Jae Seung Hwang
Topic
Currently: UCLA
Kevin Fitzell, PhD
Integration of Piezoelectric and Magnetostrictive Materials
Ernest Chen, PhD
Ultra-thin Ion Conductive Films as Solid Electrolytes for Energy Storage
Currently: Lam Research Corporation
Ryan Sheil, PhD
Ultra-thin Ion Conductive Films as Solid Electrolytes for Energy Storage
Currently: Applied Materials
Nicholas Altieri, PhD
Etch Chemistry Selection for Enabling Atomic Layer Etch of Metals
Currently: Lam Research Corporation
Jeffrey Chang, PhD
Atomic Layer Deposition Enabled Multiferroic Composites Integration for Memory Applications
Currently: McKinsey, Taipei
Sarah Lohmar (High School Intern)
Currently: Massachusetts Institute of Technology (MIT)
Caroline Yaeger (High School Intern)
Cyrus Cheung, PhD
Nano-structure Enabled Magnetoelectric Composites
Currently: Intel Corporation, Oregon
Colin Rementer, PhD
Ferromagnetic Thin Films for High Frequency Applications
Currently: Lam Research Corporation
Luke Minardi
Engineering Thin Film Solid Electrolytes
Currently: UCLA
Jack Chen, PhD.
Generalized Approach in Selecting Plasma Chemistries for Metal Etch
Currently: Lam Research Corporation
Diana Chien, PhD.
Atomic Layer Deposition of Pb(ZrxTi1-x)O3Thin Films for PiezoMEMS and Multiferroic Applications
Currently: Raytheon
Trevor Seegmiller (Masters Student)
Engineering Thin Film Solid Electrolytes
Currently: ON Semiconductor
Alex Will-Cole (TANMS undergraduate)
Dielectric Integration into Multilayered Ferroelectric Thin Films
Currently: University of Arizona
Nick Ouassil (TANMS undergraduate)
Optimization of Magnetic Properties of Multilayer Thin Films
Currently: University of Buffalo
Calvin Pham, PhD.
ALD Multiferroic Nanostructures
Currently: Lam Research Corporation
Jea Cho, PhD.
Solid Electrolyte Thin Films
Currently: Lam Research Corporation
Taeseung "Father" Kim, PhD.
Post-doctoral Researcher
Currently: Lam Research Corporation
Younghee Kim, PhD.
Post-doctoral Researcher
Currently: Korean Institute of Science and Technology
Michael Paine (undergraduate)
Plasma Processing
Institution: UCLA, Class of 2014
Juan Casillas (TANMS undergraduate)
PZT
Institution: UCLA, Class of 2014
Edward McAboy (TANMS undergraduate)
Multiferroics
Institution: UCLA, Class of 2015
Taylor Evanko (undergraduate)
CoFeB
Institution: UCLA, Class of 2015
Vladan Jankovic
Core-shell nanostructures for plasmonics
Currently: Northrop Grumman, California
Nathan Marchack
Plasma Patterning of Complex Materials
Currently: IBM, New York
Ya-Chuan (Sandy) Perng
Engineering Epitaxial Metal Oxides on Wide Bandgap Semiconductors
Currently: Intel Corporation, Oregon
Kristen Fernhoff
Comparison of intrinsic and engineered multi-ferroic materials
Currently: Washington University, St Louis
James Dorman
Multifunctional Metal Oxide Nanostructures
Currently: Louisiana State University
Han Chueh
Density functional theory study of complex metal oxides
Ashley Armenta
Characterization of the Electronic and Electrical Properties of Metal Oxides
Mayfield Senior School, CA
Katia Ameri (High School Intern)
Marlborough School, Los Angeles, Ca
Electrochemistry Study for Micro-Lithium Ion Batteries
Currently: Stanford University
Brett Berens (undergraduate)
X-ray Photoelectron Spectroscopy Study of Plasma Etched Metal Oxides and Device Testing
Tara Chang (High School Intern)
Simulation of a Cylindrical Ion Trap as a Micro-Chemical Analyzer
Marlborough High School, CA.
Currently: MIT
Byeong-Ok Cho, Ph.D. (postdoctoral researcher)
Spectroscopic Studies of Plasma Enhanced Chemical Vapor Deposition (PECVD)
Currently: Samsung Electronics, Korea
Jongwoo Choi, Ph.D. (postdoctoral researcher)
Spectroscopic Studies of Dielectric/Semiconductor Interfaces
Currently: GE Research, New York
Karen Chu (Masters Student)
Electrical Characterization of Carbon-Doped Ta2O5 Films for Embedded DRAM Applications
Currently: Nanomix, Inc., California
Kimberly Cross (Masters Student)
Surface Chemistry of Organometallic Precursors
Currently: UCLA
Dolores Cruz (Ph.D Student)
Chemical Microelectromechanical Systems
Currently: Intel Corporation, California
Carissa Eisler (Undergraduate)
Analysis of Ultra-Thin Films and Interfaces by Extended X-Ray Absorption Fine Structure (EXAFS).
Currently: Caltech
Kelly Halford (High School Intern)
Microfluidics
Mayfield Senior School, Pasadena, CA.
Currently: Princeton University
John Hoang
Sensitizer co-doped Er:Y2O3 Thin Films for Optical Applications
Currently: Lam Research Corporation
Chengche (Jerry) Hsu, Ph.D. (Post Doc)
High Density Plamsa Diagnostics and Simulation
Currently: National Taiwan University, Taiwan
Vladan Jankovic (Masters Student)
FET-based Microchemical Sensors Employing HfO2 and ZrO2
Currently: Northrop Grumman Corporation, California
John Keagy (undergraduate)
Solid State Electronic Device Fabrication
Currently: UT Austin
Angela Ku (High School Intern)
High Density Plasma Etching Processes
Mayfield Senior School, CA.
Currently: Yale University
Sandy Lao (Masters Student)
Investigation of Plasma Enhanced Deposition of Zirconium Oxide and Hafnium Oxide Thin Films
Currently: Intel Corporation, Arizona
Jingyan (Leo) Li (Masters Student)
Deposition of Functionally Engineered Dielectric Thin Films
Currently: Intel Corporation, New Mexico
Vu Le (Masters Student)
Plasma Reactor Scale Modeling
Currently: Matech Advanced Materials, Westlake Village
Shirley Lee (undergraduate)
Infrared Spectroscopy of Thin Film Analysis
Currently: UC Irvine
Jasmine Lin (undergraduate)
Diagnostic instrumentation on an ECR reactor for thin film deposition
Currently: Process Development Engineer, Novellus Systems, Inc.
You-Sheng (Wilson) Lin, Ph.D.
Synthesis and Integration of High-k Dielectric Materials
Currently: UCLA Nanoelectronics Research Facility
Jiurong Liu, Ph.D. (Post-Doc)
Material and Electrical Characterization of Metal Oxides Synthesized by Plasma Enhanced Atomic Layer Deposition
Currently: Shandong University
Ryan Martin, Ph.D. (Ph.D. Student)
High Density Plasma Enhanced Patterning of Metal Oxides
Currently: IBM, New York
Monica Sawkar-Mathur, Ph.D. (Ph.D. Student)
Deposition of Functionally Engineered Dielectric Thin Films
Currently: Intermolecular, San Jose
Yuanbing Mao, Ph.D. (Post-Doc)
Synthesis and Characterization of Metal Oxide Nano-structures
Currently: University of Texas, Pan American
Chris McCormick (undergraduate)
First-Principles Study of Silicon Carbide, a promising wide band gap semiconductor
Currently: Graduate Student, Stanford
Ragesh Puthenkovilakam, Ph.D. (Ph.D. student)
Experimental and Theoretical Studies of High-k Dielectrics on Silicon
Currently: Intel Corporation, Oregon
Desiree Ramirez (Masters Student)
Ion-enhanced Chemical Etching of Metal Oxides in Chlorine Based Plasmas
Currently: Accenture, California
Phedellee Reyer (High School Intern)
Process for Creating Complimentary Metal-Oxide-Semiconductors (CMOS)
Mayfield Senior School, Pasadena, CA.
Currently: University of California, Irvine
Lin Sha, Ph.D. (Ph.D. student)
Plasma Enhanced Etching of Metal Oxides
Currently: Intel Corporation, Oregon
Yen Ta (Masters Student)
X-ray photoelectron spectroscopic analysis of halogen etched metal oxide films
Currently: Analog Device, California
Melat Tafesse
Microstructures of Ultra-thin Dielectric Films
Currently: Micron, Virginia
Carey Tanner, Ph.D. (Ph.D. Student)
Engineering Compositionally Controlled Crystalline Metal Oxides on Wide Bandgap Semiconductors
Currently: Luna Nanoworks, Virginia
Trinh Tu Van, Ph.D. (Ph.D. Student)
Molecular Beam Simulation of Surface Kinetics
Currently: Intel Corporation, Oregon
Nicky Virdone (High School Intern)
Optical emission analysis of plasma processing
Mayfield Senior School, CA.
Currently: UCLA
Jianjun Wang (Masters Student)
High Density Plasma Enhanced Deposition of Metal Oxides
Feng Zhang (Post-Doc)
Atomic Layer Deposition of Ferroelectric Thin Films on Wide Band Gap Semiconductors
Currently: Chinese Academy of Science.
Stephanie Gachot (Masters Student)
Synthesis and Characterization of Metal Silicide Nanoparticles
Currently: Intel Corporation, Arizona
Colleen Loynachan (Summer Intern)
Thin film electrolyte materials for solid oxide fuel cells
Currently: MIT
Hiroshi Yamamoto

GROUP PHOTOS



Group Photo 2015

Halloween 2014

Group Photo 2014

Group Photo 2011-2012

Group Photo 2010-2011

Group Photo 2008-2009

Group Photo 2006-2007

Group Photo 2003-2004

Group Photo 2002-2003

Group Photo 2001-2002

Group Photo 2000-2001