Electronic Materials Synthesis and Plasma Processing Lab

Jane P. Chang - Patents

 

PATENTS
   
1. Herbert H. Sawin, Jane P. Chang. Scott A. Lawing, Zhe Zhang, and Han Xu, “Metals removal process” U.S. patent 6,083,413, 26 claims, 2000.  (JPEG)

2. Jane P. Chang, Y-S. Lin, A. Kepten, M. Sendler, S. Levy, and R. Bloom, “Methods for Depositing A Coating Having a Relatively High Dielectric Constant onto a Substrate” U.S. patent 6,884,719, 43 claims, 2005.

3. Jane P. Chang, and Robert L. Opila, “UV/halogen metal removal process” Pending.

4. Jane P. Chang, and M. L. Steigerwald, “ Doping effect in a MOM capacitor structure” Pending.

5. Jane P. Chang, and Robert L. Opila, “UV enhanced chemistry for metal and oxide removal” Pending.

 

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