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PATENTS |
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1. Herbert H. Sawin, Jane P. Chang. Scott A.
Lawing, Zhe Zhang, and Han Xu, “Metals removal process” U.S. patent
6,083,413, 26 claims, 2000. (JPEG)
2. Jane P. Chang, Y-S. Lin, A. Kepten, M. Sendler, S. Levy, and
R. Bloom, “Methods for Depositing A Coating Having a Relatively
High Dielectric Constant onto a Substrate” U.S. patent 6,884,719,
43 claims, 2005.
3. Jane P. Chang, and Robert L. Opila, “UV/halogen metal removal
process” Pending.
4. Jane P. Chang, and M. L. Steigerwald, “ Doping effect in a MOM
capacitor structure” Pending.
5. Jane P. Chang, and Robert L. Opila, “UV enhanced chemistry for
metal and oxide removal” Pending. |
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